- 설비사양
| Description | General specification | |
|---|---|---|
| Spec | Size | 4000(W) x 4600(L) x 4400(H) |
| Interior | SUS304 40T | |
| Exterior | SUS304 40T, 보강 SUS 304 25~30T | |
| Temp | Heating Unit | Sheath heater |
| Range | 400 ℃(Heater 기준) | |
| Sensor | K-Type | |
| Vacuum | Pumping |
Dry Pump : 0.075Torr(10Pa) Cryo Pump: 3.7-6Torr(5.0-4Pa) |
| Gage | Gage |
Atm Switch – Detect of ATM Prani Gage - Detect of Middle Vacuum Ion Gage – Detect of High Vacuum |
| etc | Composition |
Main Chamber Heater Transport Shield box Transport / Cassette Util line |